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Microstructures Laboratory 


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MICROSTRUCTURES LABORATORY

Mission

Located at Sandia's California site, the Microstructures Laboratory is a multi discipline user clean room facility created to apply semiconductor-microfabrication processing technology to new and exciting research ideas.

Lithography

Thin Film Deposition

Plasma Etch

Metrology

Dektak 3 Profilometer, extended range
Filmetrics F-20 thin Film measurement tool
IR and Optical Microscope with video capture

Miscellaneous

Microstructures laboratory poster